Cleanroom Monitoring

Surface Particle Scanners

Sample Scanner

The Fastmicro Sample Scanner measures particle contamination on surfaces indirectly. Particles are lifted from the part with a tape-lift sampler, and the scanner counts, sizes and locates them in seconds, down to 0.5 µm.

The samplers, Fastmicro Samplers and Particle Measurement Cards (PMCs), take samples from flat, curved and recessed surfaces, including rough or hard-to-reach areas, and leave no measurable residue. A card holder is used for these indirect measurements, and a 2-inch wafer holder lets the same scanner read witness wafers for particle fallout.

Key features

• Detects particles from 0.5 µm (PSL equivalent)
• Surface cleanliness validation according to ISO 14644-9
• Pick-up efficiency and repeatability both above 90%
• Particle count, size and position for every sample
• Results in seconds
• Samples flat, curved and cavity surfaces without residue

Technical specifications

Applications

• Equipment
• Assemblies
• Parts
• Cleaning validation

How it works

• Sample: lift the particles from the part with a sampler or PMC.
• Scan: place the sampler in the Sample Scanner.
• Read: get the particle count, size and position in seconds.

For ASML Grade 1 product qualification, Fastmicro's Particle Measurement Cards are the released sampling solution for the Sample Scanner.