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Cleanroom Monitoring

Cleanroom Monitoring

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  3. Particle Fallout Scanner

  • Airborne Particle Counters
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Surface Particle Scanners

Fastmicro

Particle Fallout Scanner

Fastmicro Particle Fallout Scanner

The Fastmicro Particle Fallout Scanner monitors the particle deposition rate on surfaces in real time, at sub-micrometre level and at the cleanliness level of your cleanroom class.

Airborne particle counts alone do not show what settles on critical surfaces. The scanner measures the particles that actually deposit, from 0.5 µm, at intervals of 10 seconds or more, and its software turns the readings into a deposition rate you can act on to improve cleanliness. It works in ambient and vacuum environments, and a high-vacuum version is also available.

Key features

  • Particle deposition rate monitoring according to ISO 14644-17
  • Lower detection limit of 0.5 µm (PSL equivalent)
  • Measurement intervals from 10 seconds
  • Real-time readings with easy-to-use software
  • For ambient and vacuum environments
  • Scanner module also available for system integrators

Technical specifications

ModelFM-PS-PFS
MeasurementParticle deposition rate on a surface, in real time
StandardISO 14644-17, particle deposition rate
Lower detection limit0.5 µm (PSL equivalent)
Measurement interval10 seconds or longer
EnvironmentAmbient and vacuum
IntegrationScanner module available as a white-label unit for system integrators

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