Semiconductor fabrication depends on cleanrooms and on utility systems such as ultrapure water, high-purity gases, exhaust gas treatment and ultra-clean air.
We support semiconductor facilities with cleanroom validation, commissioning and qualification of cleanrooms and clean utilities, and temperature mapping, and we supply cleanroom monitoring instruments and GAMP data loggers.
Clean Room Validation
ISO 14644-1 classification of wafer fabrication, packaging and test cleanrooms, filter integrity, air velocity and recovery tests, airflow visualisation, and compressed air and nitrogen testing.
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Commissioning, Qualification & Validation
Commissioning and qualification of cleanroom HVAC and clean utilities such as ultrapure water and high-purity gas systems, from URS and DQ through FAT, SAT, IQ, OQ and PQ.
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Thermal Validation
Temperature mapping of cleanrooms and zoned HVAC areas, confirming uniformity under heat loads from people and machinery and locating permanent monitoring probes.
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Instruments we supply as an authorised channel partner of global OEMs, and data loggers we design and manufacture.
Cleanroom Monitoring
Airborne particle counters, remote counters and real-time monitoring systems for wafer fabrication, packaging and test cleanrooms.
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Tracer Particle Generator
Foggers and neutrally buoyant solution for airflow visualisation in fab cleanrooms.
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Data Loggers & FacilityOne
Wired and wireless data loggers with FacilityOne for cleanroom environmental control and zoned HVAC areas with stage-specific setpoints.
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Surface Particle Inspection
Surface particle scanners and particle fallout monitoring for measuring particle contamination on critical surfaces.
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